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1

Strain relaxation processes in strained-Si layer on SiGe-on-insulator substrates

Norio Hirashita, Naoharu Sugiyama, Eiji Toyoda, Shin-ichi Takagi

Journal:

Thin Solid Films

Year:

2006

Language:

english

File:

PDF, 295 KB

english, 2006

2

Strained SOI/SGOI dual-channel CMOS technology based on the Ge condensation technique

Tezuka, Tsutomu, Nakaharai, Shu, Moriyama, Yoshihiko, Hirashita, Norio, Toyoda, Eiji, Numata, Toshinori, Irisawa, Toshifumi, Usuda, Koji, Sugiyama, Naoharu, Mizuno, Tomohisa, Takagi, Shin-ichi

Journal:

Semiconductor Science and Technology

Year:

2007

Language:

english

File:

PDF, 788 KB

english, 2007

3

Cross-sectional Transmission Electron Microscope Studies on Intrinsic Breakdown Spots of Thin Gate Oxides

Ikeda, Satoshi, Okihara, Masao, Uchida, Hidetsugu, Hirashita, Norio

Journal:

Japanese Journal of Applied Physics

Year:

1997

Language:

english

File:

PDF, 276 KB

english, 1997

4

Observation of microstructure at the polycrystalline silicon and tungsten silicide interface

Masahiro Itoh, Hideki Itoh, Norio Hirashita, Masako Kinoshita, Tuneo Ajioka

Journal:

Applied Surface Science

Year:

1992

Language:

english

File:

PDF, 712 KB

english, 1992

5

Strain characterization in SOI and strained-Si on SGOI MOSFET channel using nano-beam electron diffraction (NBD)

Koji Usuda, Toshinori Numata, Toshifumi Irisawa, Norio Hirashita, Shinichi Takagi

Journal:

Materials Science and Engineering: B

Year:

2005

Language:

english

File:

PDF, 174 KB

english, 2005

6

Study of the surface cleaning of GOI and SGOI substrates for Ge epitaxial growth

Yoshihiko Moriyama, Norio Hirashita, Koji Usuda, Shu Nakaharai, Naoharu Sugiyama, Eiji Toyoda, Shin-ichi Takagi

Journal:

Applied Surface Science

Year:

2009

Language:

english

File:

PDF, 800 KB

english, 2009

7

Lattice relaxation and dislocation generation/annihilation in SiGe-on-insulator layers during Ge condensation process

Tsutomu Tezuka, Yoshihiko Moriyama, Shu Nakaharai, Naoharu Sugiyama, Norio Hirashita, Eiji Toyoda, Yoshiji Miyamura, Shin-ichi Takagi

Journal:

Thin Solid Films

Year:

2006

Language:

english

File:

PDF, 232 KB

english, 2006

8

Planar defect formation mechanism in Ge-rich SiGe-on-insulator substrates during Ge condensation process

Norio Hirashita, Shu Nakaharai, Yoshihiko Moriyama, Koji Usuda, Tsutomu Tezuka, Naoharu Sugiyama, Shin-ichi Takagi

Journal:

Thin Solid Films

Year:

2008

Language:

english

File:

PDF, 893 KB

english, 2008

9

Proton channeling into the Si substrate at the bottom of ultrahigh-aspect-ratio contact holes during plasma etching

Takashi Ichimori, Naokatsu Ikegami, Norio Hirashita, Jun Kanamori

Journal:

Thin Solid Films

Year:

2000

Language:

english

File:

PDF, 924 KB

english, 2000

10

Characterization of anisotropic relaxation rate of SGOI (110) substrates

Yoshihiko Moriyama, Norio Hirashita, Naoharu Sugiyama, Shin-ichi Takagi

Journal:

Thin Solid Films

Year:

2008

Language:

english

File:

PDF, 286 KB

english, 2008

11

Electron diffraction observation of epitaxial silicon grown on a CaF2/Si(100) structure

Sasaki, Masayoshi, Hirashita, Norio, Onoda, Hiroshi, Hagiwara, Shirou

Journal:

Applied Physics Letters

Year:

1985

Language:

english

File:

PDF, 579 KB

english, 1985

12

{110}-facets formation by hydrogen thermal etching on sidewalls of Si and strained-Si fin structures

Tezuka, Tsutomu, Hirashita, Norio, Moriyama, Yoshihiko, Sugiyama, Naoharu, Usuda, Koji, Toyoda, Eiji, Murayama, Ken, Takagi, Shin-ichi

Journal:

Applied Physics Letters

Year:

2008

Language:

english

File:

PDF, 535 KB

english, 2008

13

Misfit strain relaxation in strained-Si layers on silicon-germanium-on-insulator substrates

Hirashita, Norio, Moriyama, Yoshihiko, Sugiyama, Naoharu, Toyoda, Eiji, Takagi, Shin-ichi

Journal:

Applied Physics Letters

Year:

2006

Language:

english

File:

PDF, 478 KB

english, 2006

14

[IEEE 2007 International Semiconductor Device Research Symposium - College Park, MD, USA (2007.12.12-2007.12.14)] 2007 International Semiconductor Device Research Symposium - Carrier-transport-enhanced CMOS using new channel materials and structures

Shinichi Takagi,, Toshifumi Irisawa,, Tsutomu Tezuka,, Shu Nakaharai,, Koji Usuda,, Norio Hirashita,, Mitsuru Takenaka,, Naoharu Sugiyama,

Year:

2007

Language:

english

File:

PDF, 1.05 MB

english, 2007

15

Lateral solid phase epitaxy of Si over SiO2 patterns and its application to silicon-on-insulator transistors

Sasaki, Masayoshi, Katoh, Teruo, Onoda, Hiroshi, Hirashita, Norio

Journal:

Applied Physics Letters

Year:

1986

Language:

english

File:

PDF, 376 KB

english, 1986

16

Uniaxial and biaxial strain field dependence of the thermal oxidation rate of silicon

Noma, Hirokazu, Takahashi, Hiroyuki, Fujioka, Hiroshi, Oshima, Masahara, Baba, Yuji, Hirose, Kazuyuki, Niwa, Masaaki, Usuda, Koji, Hirashita, Norio

Journal:

Journal of Applied Physics

Year:

2001

Language:

english

File:

PDF, 427 KB

english, 2001

17

Relaxation processes in strained Si layers on silicon-germanium- on-insulator substrates

Hirashita, Norio, Sugiyama, Naoharu, Toyoda, Eiji, Takagi, Shin-ichi

Journal:

Applied Physics Letters

Year:

2005

Language:

english

File:

PDF, 505 KB

english, 2005

18

Strain analysis in ultrathin SiGe-on-insulator layers formed from strained Si-on-insulator substrates by Ge-condensation process

Tezuka, Tsutomu, Hirashita, Norio, Moriyama, Yoshihiko, Nakaharai, Shu, Sugiyama, Naoharu, Takagi, Shin-ichi

Journal:

Applied Physics Letters

Year:

2007

Language:

english

File:

PDF, 374 KB

english, 2007

19

Variation of Threshold Voltage in Strained Si Metal–Oxide–Semiconductor Field-Effect Transistors Induced by Non-uniform Strain Distribution in Strained-Si Channels on Silicon–Germanium-on-Insulator Substrates

Sugiyama, Naoharu, Numata, Toshinori, Hirashita, Norio, Irisawa, Toshifumi, Takagi, Shin-ichi

Journal:

Japanese Journal of Applied Physics

Year:

2008

Language:

english

File:

PDF, 272 KB

english, 2008

20

Direct Observation of Solid-Phase Epitaxial Growth of Si at Contact Holes Through Al-Si Alloy

Hirashita, Norio

Journal:

Journal of The Electrochemical Society

Year:

1988

Language:

english

File:

PDF, 676 KB

english, 1988

21

Thermal Desorption Studies of Phosphorus-Doped Spin-on-Glass Films

Hirashita, Norio

Journal:

Journal of The Electrochemical Society

Year:

1992

Language:

english

File:

PDF, 571 KB

english, 1992

22

[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Ge Condensation Technologies for Advanced MOSFETs on SGOI and GOI Substrates

Sugiyama, Naoharu, Tezuka, Tsutomu, Irisawa, Toshifumi, Usuda, Koji, Moriyama, Yoshihiko, Nakaharai, Shu, Hirashita, Norio, Takagi, Shin-Ichi

Year:

2006

Language:

english

File:

PDF, 513 KB

english, 2006

23

SiGe-on-Insulator and Ge-on-Insulator Substrates Fabricated by Ge-Condensation Technique for High-Mobility Channel CMOS Devices

Tezuka, Tsutomu, Mizuno, Tomohisa, Sugiyama, Naoharu, Nakaharai, Shu, Moriyama, Yoshihiko, Usuda, Koji, Numata, Toshinori, Hirashita, Norio, Maeda, Tatsuro, Takagi, Shin-ichi, Miyamura, Yoshiji, Toyod

Journal:

MRS Proceedings

Year:

2004

Language:

english

File:

PDF, 709 KB

english, 2004

24

[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Study of the Surface Cleaning of GOI and SGOI Substrates for Ge Epitaxial Growth

Moriyama, Yoshihiko, Hirashita, Norio, Toyoda, Eiji, Usuda, Koji, Nakaharai, Shu, Sugiyama, Naoharu, Takagi, Shin-Ichi

Year:

2006

Language:

english

File:

PDF, 1013 KB

english, 2006

25

[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Uniaxially Strained SGOI and SSOI Channels for High Performance Multi-Gate CMOS

Irisawa, Toshifumi, Numata, Toshinori, Tezuka, Tsutomu, Usuda, Koji, Hirashita, Norio, Moriyama, Yoshihiko, Sugiyama, Naoharu, Takagi, S.

Year:

2008

Language:

english

File:

PDF, 2.70 MB

english, 2008

26

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Mobility-Enhanced Device Technologies Using SiGe/Ge MOS Channels

Takagi, Shinichi, Irisawa, Toshifumi, Tezuka, Tsutomu, Nakaharai, Shu, Numata, Toshinori, Hirashita, Norio, Moriyama, Yoshihiko, Usuda, Koji, Dissanayake, Sanjeewa, Takenaka, Mitsuru, Sugahara, Satosh

Year:

2007

Language:

english

File:

PDF, 940 KB

english, 2007

27

Mechanisms of Surface Reaction in Fluorocarbon Dry Etching of Silicon Dioxide-An Effect of Thermal Excitation

Ikegami, Naokatsu, Ozawa, Nobuo, Miyakawa, Yasuhiro, Hirashita, Norio, Kanamori, Jun

Journal:

Japanese Journal of Applied Physics

Year:

1992

File:

PDF, 850 KB

1992

28

Effect of Stress on Oxide Edge Shape of Local Oxidation of Silicon for Various Oxidation Temperatures

Okihara, Masao, Kuroda, Shigeki, Itoh, Masahiro, Hirashita, Norio

Journal:

Japanese Journal of Applied Physics

Year:

1995

File:

PDF, 1.10 MB

1995

29

Thermal Desorption Spectroscopy and X-Ray Photoelectron Spectroscopy Study of C F x Layer Deposited on Si and S i O 2

Miyakawa, Yasuhiro, Fujita, Ken, Hirashita, Norio, Ikegami, Naokatsu, Hashimoto, Jun, Matsui, Takayuki, Kanamori, Jun

Journal:

Japanese Journal of Applied Physics

Year:

1994

Language:

english

File:

PDF, 1.02 MB

english, 1994

30

Structural Study of Single {111}-Facetted CoSi2/Si Interface Incorporated in a Silicon-on-Insulator Metal-Oxide-Semiconductor-Field-Effect-Transistor

Ichimori, Takashi, Hirashita, Norio

Journal:

Japanese Journal of Applied Physics

Year:

2001

File:

PDF, 691 KB

2001

31

Corrugated Structures on Si(110) Surfaces Treated in Ammonium Fluoride Solutions

Fujita, Ken, Hirashita, Norio

Journal:

Japanese Journal of Applied Physics

Year:

1994

Language:

english

File:

PDF, 593 KB

english, 1994

32

Kinetic Analysis of the C49-to-C54 Phase Transformation in TiSi 2 Thin Films by In Situ Observation

Tanaka, Hiroyuki, Hirashita, Norio, Sinclair, Robert

Journal:

Japanese Journal of Applied Physics

Year:

1998

File:

PDF, 1.08 MB

1998

33

Effects of Trap State on Field-Effect Mobility of MOSFET's Formed on Large-Grain Polysilicon Films

Katoh, Teruo, Hirashita, Norio

Journal:

Japanese Journal of Applied Physics

Year:

1989

Language:

english

File:

PDF, 235 KB

english, 1989

34

Desorption Kinetics of Ar Implanted into Si

Hirashita, Norio

Journal:

Japanese Journal of Applied Physics

Year:

1999

Language:

english

File:

PDF, 525 KB

english, 1999

35

High Resolution Tem Studies of Solid-Phase Epitaxial Si at Contact Holes Through Al-Si Alloy

Hirashita, Norio, Kinoshita, Masako, Ajioka, Tsuneo

Journal:

MRS Proceedings

Year:

1989

Language:

english

File:

PDF, 1.93 MB

english, 1989

36

Reduction of Ca and F Segregated at the Surface of a Si/CaF2/Si(100) Structure By Solid Phase Epitaxy of Si

Sasaki, Masayoshi, Onoda, Hiroshi, Hirashita, Norio

Journal:

MRS Proceedings

Year:

1985

Language:

english

File:

PDF, 1.49 MB

english, 1985

37

Fabrication of Si-Gate CMOS Devices In A Heteroepitaxial Si/Caf2/Si Structure

Onoda, Hiroshi, Sasaki, Masayoshi, Katoh, Teruo, Hirashita, Norio

Journal:

MRS Proceedings

Year:

1987

Language:

english

File:

PDF, 1.51 MB

english, 1987

38

Quantitative desorption analysis of ultra large scale integration materials by thermal desorption spectroscopy.

HIRASHITA, Norio, UCHIYAMA, Taizou

Journal:

Year:

1994

File:

PDF, 1.12 MB

1994

39

Cyanide Detection from Nickel Electrodeposited in Modified Watts Baths Including Glycine and Cyanide Production at Anodic Sides in the Baths

MIZUHASHI, Shoei, ARAKAWA, Tomiyuki, WATANABE, Nobuaki, KOIKE, Shoma, URANO, Makoto, MAEJIMA, Kunimitsu, HIRASHITA, Norio, KOIWA, Ichiro

Journal:

Electrochemistry

Year:

2016

Language:

english

File:

PDF, 1.00 MB

english, 2016

40

Micro-probe AES and AEM analysis of ULSI devices.

Hirashita, Norio

Journal:

Year:

1995

File:

PDF, 2.66 MB

1995

41

Surgical Training With Live Animal Models for Laparoscopic Gastrectomy

Ueda, Yoshitake, Shiraishi, Norio, Hirashita, Teijiro, Etoh, Tsuyoshi, Inomata, Masafumi, Kitano, Seigo

Journal:

Surgical Innovation

Year:

2017

Language:

english

File:

PDF, 480 KB

english, 2017

42

Clinical impact of small advanced gastric cancer (≤ 40 mm) in elderly patients: A retrospective cohort study

Ueda, Yoshitake, Fujishima, Hajime, Hirashita, Teijiro, Shiroshita, Hidefumi, Etoh, Tsuyoshi, Inomata, Masafumi, Shiraishi, Norio

Journal:

International Journal of Surgery

Year:

2017

Language:

english

File:

PDF, 636 KB

english, 2017

43

Fabrication and Electrical Characterization of Strained Si-on-insulator/Strained SiGe-on-insulator Dual Channel CMOS structures with High-Mobility Channels

Tezuka, Tsutomu, Nakaharai, Shu, Moriyama, Yoshihiko, Hirashita, Norio, Toyoda, Eiji, Sugiyama, Naoharu, Mizuno, Tomohisa, Takagi, Shinichi

Journal:

IEEJ Transactions on Electronics Information and Systems

Year:

2006

File:

PDF, 990 KB

2006

44

10.4139/sfj.62.54

DEGUCHI, Kazuki, HIRASHITA, Norio, MAEJIMA, Kunimitsu, KOIWA, Ichiro

Journal:

Journal of The Surface Finishing Society of Japan

Year:

2011

File:

PDF, 1.38 MB

2011

45

Measurements of Outgassing Rates in a Field of Analysis

HIRASHITA, Norio, URANO, Makoto, YOSHIDA, Hajime

Journal:

Journal of the Vacuum Society of Japan

Year:

2014

File:

PDF, 726 KB

2014

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